Combined Sources Sought Notice and Notice of Intent to Sole Source for a Silane Distribution System for the Boulder Microfabrication Facility

***THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE*** The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government’s anticipated needs. If no alternate sources are identified, the Government intends to issue a Sole Source Award to CVD Equipment Corporation, 355, South Technology Drive, Central Islip, NY 11722, US, under the authority of FAR 12.102(a). The North American Industry Classification System (NAICS) code for this acquisition is 333242, Semiconductor Machinery Manufacturing. BACKGROUND The National Institute of Standards and Technology (NIST) has a state-of-the-art research laboratory (the Katharine Blodgett Gebbie Building) in Boulder, CO to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). Among the many critical pieces of equipment in this laboratory is equipment that uses the process gasses silane (SiH4). Silane is a toxic and pyrophoric gas and needs to be stored in and outside bunker using a gas rack and is delivered to tools through a specialized gas valve manifold box (VMB). Recently, the BMF has learned that their existing system has reached end of life and the system needs to be replaced for safety and operational reasons. The Government requires a new silane delivery system that is compatible with its existing life safety equipment, such as the toxic gas monitoring system (TGMS) and other gas cabinets to continue to use silane as process gases. The NIST BMF has many toxic gases that it uses in the process of making its NIST mission critical devices. Among these gases is silane which, for safety reasons, is sourced out of a single bottle in an outside gas bunker. Further distribution through the BMF requires the use of a Valve Manifold Box (VMB). Due to the life safety hazards associated w