CFI: Atomic Layer Etcher (ALE) System

The Atomic Layer Etcher, which is the subject of this RFP, is to be utilized for the precise etch of thin layers of dielectrics, metals and superconducting materials as part of the fabrication of quantum devices. This system will form part of the growing toolset managed under the University of Waterloo’s Quantum-Nano Fabrication and Characterization Facility (QNFCF) core scientific platform. The facility enables scientists and engineers to pursue frontier research in materials science, nanotechnology, and quantum information processing.