Plasma Focused Ion Beam System & Time-of-Flight Secondary Ion Mass Spectrometry

Background and Purpose McMaster University and the Canadian Centre for Electron Microscopy (CCEM) have a requirement for one (1) plasma focused ion beam scanning electron microscope (PFIB-SEM) with multiple selectable ion species and integrated time-of-flight secondary ion mass spectrometry (ToF-SIMS). The purchase is funded in part through the Canada Foundation for Innovation (CFI) Fund. The CCEM is a national facility for electron microscopy and is committed to providing its academic, government and industry user base with accessible, state-of-the-art instrumentation. Three-dimensional elemental and isotopic analysis with high sensitivity for light elements (including hydrogen and lithium), together with large-volume and low-damage sample preparation using ion species matched to each material, has been identified as a gap in the capabilities currently available to CCEM users, particularly in research on semiconductors, energy and battery materials, critical minerals and metallurgy. This requirement is to include: A PFIB-SEM with multiple selectable ion species and a high-resolution, low-voltage field emission SEM column; An integrated ToF-SIMS detector for elemental and isotopic 2D and 3D analysis; Gas delivery, nanomanipulation and automated sample preparation, serial sectioning and delayering capability; and Installation and training. The system must combine an inductively coupled plasma ion column offering four software-selectable ion species (xenon, argon, oxygen and nitrogen) with high-current milling, a monochromated field emission SEM column for sub-nanometre imaging at low landing energies, and a ToF-SIMS detector integrated and supported by the microscope manufacturer. The selectable ion species allow the ion beam to be matched to each material and analysis, including oxygen ions that enhance secondary ion yields for SIMS. This combination is required to meet the needs of CCEM’s researchers and users. The purpose of this Advance Contract Award Notice (ACA