Scanning Transmission Electron Microscope with 4D STEM Detector & CL
McMaster University
Background and Purpose McMaster University and the Canadian Centre for Electron Microscopy (CCEM) have a requirement for one (1) probe aberration-corrected, field-free capable scanning transmission electron microscope (S/TEM), together with a high-speed direct electron detector for four-dimensional STEM (4D-STEM) and an integrated cathodoluminescence (CL) and light-injection system. The purchase is funded in part through the Canada Foundation for Innovation (CFI) Fund. The CCEM is a national facility for electron microscopy and is committed to providing its academic, government and industry user base with accessible, state-of-the-art instrumentation. Atomic-resolution imaging and spectroscopy combined with fast 4D-STEM (including electron ptychography and field mapping), magnetic-field-free (Lorentz) imaging, and correlated optical spectroscopy have been identified as a gap in the capabilities currently available to CCEM users, particularly in research on semiconductors, quantum and magnetic materials, energy materials and critical minerals. This requirement is to include: A 300 kV probe aberration-corrected S/TEM with a high-brightness cold field emission source, integrated energy dispersive X-ray spectroscopy (EDS), electron energy loss spectroscopy (EELS) and energy filtering; A high-speed, high-dynamic-range direct electron detector for 4D-STEM, fully integrated with the microscope; An in-column CL and light-injection system integrated with the microscope; Supporting software, installation, training, warranty and service support. The system must combine a high-brightness cold field emission source with fifth-order probe aberration correction at all accelerating voltages, including aberration-corrected field-free (Lorentz) STEM, a thermally stable lens design for rapid switching between voltages and modes, a wide-gap objective lens compatible with tomography and in-situ holders, and fully integrated EDS, EELS and energy-filtered imaging. Its integration with the
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